JPH0719082Y2 - イオン源用電極 - Google Patents
イオン源用電極Info
- Publication number
- JPH0719082Y2 JPH0719082Y2 JP12425689U JP12425689U JPH0719082Y2 JP H0719082 Y2 JPH0719082 Y2 JP H0719082Y2 JP 12425689 U JP12425689 U JP 12425689U JP 12425689 U JP12425689 U JP 12425689U JP H0719082 Y2 JPH0719082 Y2 JP H0719082Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- cooling pipe
- ion source
- aluminum
- titanium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001816 cooling Methods 0.000 claims description 31
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 12
- 229910052782 aluminium Inorganic materials 0.000 claims description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 11
- 239000010936 titanium Substances 0.000 claims description 11
- 238000010884 ion-beam technique Methods 0.000 claims description 7
- 238000005304 joining Methods 0.000 claims description 4
- 239000002826 coolant Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 description 14
- 238000005219 brazing Methods 0.000 description 11
- 239000003507 refrigerant Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000001513 hot isostatic pressing Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12425689U JPH0719082Y2 (ja) | 1989-10-23 | 1989-10-23 | イオン源用電極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12425689U JPH0719082Y2 (ja) | 1989-10-23 | 1989-10-23 | イオン源用電極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0362448U JPH0362448U (en]) | 1991-06-19 |
| JPH0719082Y2 true JPH0719082Y2 (ja) | 1995-05-01 |
Family
ID=31672188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12425689U Expired - Lifetime JPH0719082Y2 (ja) | 1989-10-23 | 1989-10-23 | イオン源用電極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719082Y2 (en]) |
-
1989
- 1989-10-23 JP JP12425689U patent/JPH0719082Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0362448U (en]) | 1991-06-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |